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Vacuum pump
Direct Drive Oil-Sealed Rotary Vacuum Pumps
Direct Drive Oil-Sealed Rotary Vacuum Pumps

SGD Series

Oil-sealed rotary pumps are widely used as an economical pump to compress gases whose pressure ranges from atmospheric pressure up to 0.13 to 1.3 ×10-2Pa and then exhaust them into the air.

Direct Drive Oil-sealed Rotary Vacuum Pumps offer both compactness and cleanness for clean room applications.

Mechanical Booster Pump
Mechanical Booster Pump

SMB-D Series SMB-DM Series

A mechanical booster pump is not designed to compress and discharge the gas to the atmospheric pressure. Its performance varies with the type and performance of the second-stage pump.

SMB-D Series
- The rotor turns at a high 3500min-1(60Hz) for
efficient exhaust performance
- Built-in pressure equalizer eliminates leakage

Lightweight, Compact Direct Drive booster Pumps meet the need for clean vacuums.