SGH Series

The oil-sealed oil rotary vacuum pump is what can evacuate from atmospheric pressure to 7 x 10-2 Pa. A compact direct connection type that is integrated with the motor. A vane type vacuum pump with excellent quietness and low vibration. In addition, Have a built-in oil reverse flow preventive mechanism, which prevents vacuum oil from flowing back if accidentally stopped.

SMB-D Series SMB-DM Series

A mechanical booster pump is not designed to compress and discharge the gas to the atmospheric pressure. Its performance varies with the type and performance of the second-stage pump.

SMB-D Series
- The rotor turns at a high 3500min-1(60Hz) for
efficient exhaust performance
- Built-in pressure equalizer eliminates leakage

Lightweight, Compact Direct Drive booster Pumps meet the need for clean vacuums.